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发明名称
RECYCLING OF A WAFER COMPRISING A MULTI-LAYER STRUCTURE AFTER TAKING-OFF A THIN LAYER
摘要
申请公布号
KR100889886(B1)
申请公布日期
2009.03.20
申请号
KR20057012742
申请日期
2005.07.07
申请人
发明人
分类号
H01L27/12;C30B23/00;H01L21/306;H01L21/762;(IPC1-7):H01L27/12
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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