THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING DISPLAY DEVICE HAVING THIN FILM TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable thin film transistor exhibiting excellent electric characteristics, and to provide a method of manufacturing a display device having the thin film transistor. SOLUTION: Crystallinity on the interface of a gate insulating film and a microcrystalline semiconductor film is enhanced by forming the gate insulating film on a gate electrode, forming crystalline nuclei on the gate insulating film by using silane fluoride and silane, and forming the microcrystalline semiconductor film by crystal growth using the crystalline nuclei as seeds. Thereafter, a thin film transistor is formed by using the microcrystalline semiconductor film having crystallinity enhanced on the interface to the gate insulating film as a channel formation region. COPYRIGHT: (C)2009,JPO&INPIT