发明名称 Method and system for improved trajectory planning and execution
摘要 A trajectory planning process receives data generated by high-level control software. This data defines positions and scan velocities. The trajectory planning process creates sequences of constant acceleration intervals that allow critical motions to be executed at maximum throughput. The trajectory planning process outputs a profile. A profile executor, using the profile output by the trajectory planner process, generates continuous synchronized, filtered, multi-axis position and acceleration commands that drive control servos. Time intervals generated by the trajectory planner are quantized to be integer multiples of a real time clock period. The trajectory planner outputs have infinite jerk, but are smoothed by filters in the profile executor to both limit jerk and minimize servo-tracking errors. The trajectory planner allows time for the profile executor filters, but does not restrict fine tuning of the shape of these filters, provided that the width of the tuned filter does not exceed the allowed time.
申请公布号 US7389155(B2) 申请公布日期 2008.06.17
申请号 US20040002429 申请日期 2004.12.03
申请人 ASML HOLDING N.V. 发明人 GALBURT DANIEL;BEDNAREK TODD
分类号 G06F19/00;H01L21/027;G03F7/20 主分类号 G06F19/00
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