发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a ultrasonic bonding fixture capable of efficiently and easily connecting a conductive member to an electrode of a semiconductor device using ultrasonic. <P>SOLUTION: An ultrasonic-bond fixture 15 which directly ultrasonic-bonds a conductive current path member 6 to an electrode member 4 formed in an upper surface of a semiconductor device 5 has: a contact end surface 15a for contacting the current path member 6 to give supersonic vibration to the current path member 6; and a suction hole 16 for sucking the current path member 6 to support the current path member 6 against the contact end surface 15a. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP4372162(B2) 申请公布日期 2009.11.25
申请号 JP20070016574 申请日期 2007.01.26
申请人 发明人
分类号 H01L21/607;B23K20/10;H01L21/60;H01L23/48 主分类号 H01L21/607
代理机构 代理人
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