| 摘要 |
PROBLEM TO BE SOLVED: To provide a device packaging facility and its method capable of reducing the impact of using phthalate in place of flux, in a packaging process, on the human body, apparatus and environment, and to provide a device processing apparatus.SOLUTION: A device packaging facility 301 includes a mounting unit for supplying a phthalate 300 between a first device 100 and a second device 200 and bonding them each other, a processing unit for removing the phthalate by heat treating the first device and second device bonded each other, and fixing them each other, and a transfer unit for transferring the first device and second device bonded each other from the mounting unit to processing unit.SELECTED DRAWING: Figure 13 |
