| 摘要 |
A method for treating a substrate in a fluidised bed treatment facility usi ng a halide gas plus a nitrogen and/or carbon containing gas introduced from a source separate to the source of halide gas, such that a surface layer forms on the substrate and includes at least one species chosen from the group comprising carbides, nitrides, carbonitrides, oxycarbonitrides and mixtures thereof. There is also provided an arrangement for introducing gases to a fluidised bed treatment facility.
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