APPARATUS FOR ALIGNING WAFER FOR SEMICONDUCTOR FABRICATION

摘要

PURPOSE: An apparatus for aligning a wafer for semiconductor fabrication is provided to handle a loading position of the wafer to the horizontal direction by using a loading position handling member. CONSTITUTION: A wafer(110) is loaded on a plurality of alignment pins(120). A motor is used for rotating the alignment pins(120). A rotary shaft transmits power to a lower portion of the alignment pins(120). A sensor(150) is installed at a side of the alignment pins(120). The sensor(150) is formed with a light emitting portion(151) and a light receiving portion(152). A loading position handling member(200) is installed at the outside of the alignment pins(120). A through-hole(240) is formed in a housing(210). A plurality of guide projections(220) are formed at an upper side of the housing(210). An elevation driving portion(160) is formed at a lower portion of the housing(210). The housing(210) has an incline plane(230).