发明名称 Scanning electron microscope
摘要 Two marks of variable positions are displayed in superposition on the image of a specimen. The distance between two points on the specimen corresponding respectively to the marks is calculated on the basis of the magnification of the image of the specimen. The distance thus calculated is multiplied by a predetermined coefficient.
申请公布号 US4233510(A) 申请公布日期 1980.11.11
申请号 US19780966607 申请日期 1978.12.05
申请人 HITACHI, LTD. 发明人 SATO, SEISIRO
分类号 G01B11/02;G01B21/02;H01J37/28 主分类号 G01B11/02
代理机构 代理人
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