发明名称 |
Ion-electron analyzer |
摘要 |
An ion-electron analyzer consists of an ion microprobe analyzer and an electron diffractometer which are accommodated in a single housing, an ion gun extracts an electron beam and a negative ion beam simultaneously from the same source of charged particles and simultaneously bombards these beams onto a selected location on the surface of a specimen.
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申请公布号 |
US4233509(A) |
申请公布日期 |
1980.11.11 |
申请号 |
US19790008258 |
申请日期 |
1979.02.01 |
申请人 |
HITACHI, LTD. |
发明人 |
TAMURA, HIFUMI;ISHITANI, TOHRU |
分类号 |
G01N23/225;H01J37/252;H01J37/295 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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