发明名称 Ion-electron analyzer
摘要 An ion-electron analyzer consists of an ion microprobe analyzer and an electron diffractometer which are accommodated in a single housing, an ion gun extracts an electron beam and a negative ion beam simultaneously from the same source of charged particles and simultaneously bombards these beams onto a selected location on the surface of a specimen.
申请公布号 US4233509(A) 申请公布日期 1980.11.11
申请号 US19790008258 申请日期 1979.02.01
申请人 HITACHI, LTD. 发明人 TAMURA, HIFUMI;ISHITANI, TOHRU
分类号 G01N23/225;H01J37/252;H01J37/295 主分类号 G01N23/225
代理机构 代理人
主权项
地址