| 摘要 |
PURPOSE:To attain mass-production by providing two preliminary vacuum chambers and arranging three devices for disk loading and unloading, substrate heating, and vapor deposition of a reflecting film at a circumference in a primary vacuum container, and performing the treatments successively. CONSTITUTION:A disk 1 is taken in the vacuum container through a preliminary vacuum chamber 10 and loaded at the 1st rotation position (disk loading and unloading position) 14 at the outer circumference of a turntable 13. Then the turntable 13 rotates to move the disk to the 2nd rotation position (substrate heating position for the disk) 15 and the disk is heated by a heater 16. Further, the disk passes through a preliminary rotation position 17 and Al is sputtered at the 3rd rotation position (sputtering position) 18. Lastly, the disk 1 is unloaded at the disk loading and unloading position 14 and then taken out through a preliminary vacuum chamber 20. |
