| 摘要 |
PURPOSE:To decrease the scattering loss of light in an optical waveguide by substituting the components in a multi-component glass film formed on a silicon substrate with ions of silver, thallium, etc. CONSTITUTION:A mask 3 consisting of Al is formed on the surface of the glass film 2 on the silicon substrate. The mask 3 is formed except the surface of the glass film 2 to be later formed as an optical waveguide. A soln. of AgNO3 or TlNO3 is brought into reaction with the surfaces of the glass film 2 and mask 3 and is heated up to about 400 deg.C by which the silver or thallium is converted to ions and is subjected to the ion exchange with the sodium (or potassium) in the glass film 2. The decrease of the intensity of the light passing in the waveguide device is thereby prevented. |
