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发明名称
Verfahren zur Kristallzüchtung von III-V Halbleiterverbindungen
摘要
申请公布号
DE69508801(T2)
申请公布日期
1999.08.26
申请号
DE19956008801T
申请日期
1995.01.05
申请人
SUMITOMO CHEMICAL CO.
发明人
MATSUDA, YOSHINOBU;HATA, MASAHIKO;FUKUHARA, NOBORU;ISHIHARA, TOSHIO
分类号
H01L21/205;C30B25/02;(IPC1-7):C30B25/02;C23C16/30
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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