ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a process for efficiently producing the interlayer laminated films of high transmittance and high heat resistance of a TFT(thin-film transistor) substrate of a structure in which pixel electrodes and wiring overlap and an active matrix type liquid crystal display device having such TFT(thin-film transistor) substrate. SOLUTION: An org. film 100 is formed in at least part of the interlayer insulating films and is subjected to patterning by a wet etching method. A ground surface is patterned by a dry etching method using the org. film patterns 101 as a mask. A benzocyclobutene polymer or polysilazane compd. or a polymer of a cardo type compd. and a compd. having an epoxy group or an acrylic resin is used as the material, for the org. film 100.