发明名称 |
Thin film capacitor with electrodes having a perovskite structure and a metallic conductivity |
摘要 |
A thin film capacitor comprises a dielectric thin film having a perovskite structure sandwiched between top and bottom electrodes. At least one of the top and bottom electrodes is made of a conductive oxide material having a perovskite structure represented with a general formula of ABO3 in which A represents A-site elements composed of at least two of alkaline-earth and rare earth metals, and B represents B-site elements composed of at least one of transition metals. The capacitors involve a small leakage current, occupy a small area, and provide large capacitance. Accordingly, the capacitors realize a high integration semiconductor memory such as a DRAM of gigabit order.
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申请公布号 |
US5986301(A) |
申请公布日期 |
1999.11.16 |
申请号 |
US19970858768 |
申请日期 |
1997.05.19 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
FUKUSHIMA, NOBURU;KAWAKUBO, TAKASHI;SHIMIZU, TATSUO |
分类号 |
C30B29/22;H01G4/33;H01L21/02;H01L21/822;H01L21/8242;H01L21/8246;H01L27/04;H01L27/105;H01L27/108;H01L27/115;H01L27/12;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 |
主分类号 |
C30B29/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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