| 摘要 |
PURPOSE: A thin film actuated mirror array and a method for fabricating the same are to improve the quality of the picture projected onto a screen by increasing the light efficiency reflected by a mirror. CONSTITUTION: An active matrix(100) has an MxN transistor installed therein. The active matrix includes the first metal layer(155) having a drain pad on one side thereof, the second metal layer(165) formed on the first metal layer, and the third metal layer(171) formed on the second metal layer. An actuator(220) includes a supporting layer(190) having a rectangular shape, a lower electrode(195) formed on the supporting layer, a deformation layer(200) formed on the lower electrode, an upper electrode(205) formed on the deformation layer, a via contact(215) for electrically connecting the drain pad of the first metal layer and the lower electrode, and the second and third via contacts(216,217) for electrically connecting the upper part of the third metal layer and the upper electrode. A post is formed on the actuator. A mirror(235) is supported at the center thereof by the post.
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