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发明名称
摘要
申请公布号
JP3069106(B2)
申请公布日期
2000.07.24
申请号
JP19890105922
申请日期
1989.04.27
申请人
发明人
分类号
H01L29/201;H01L29/80;(IPC1-7):H01L29/80
主分类号
H01L29/201
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