| 摘要 |
PROBLEM TO BE SOLVED: To improve the mechanical strength of a xerogel layer by moving most of the polymer material outward from the minimum gap between adjacent lines connected to each other while the xerogel layer is formed, by giving phase separation to the xerogel and generating an air gap below the xerogel layer as an intermediate-level dielectric substance in a mutually connected multistage integrated circuit. SOLUTION: A polymer material, the surface of which is coated with a liner 140, is coated with a solution prepared by adding a xerogel precursor solution consisting of a hydrolyzed TEOS monomer, oligomer condensed from water, tetraethylene glycol(TEG), and an acid to an ethanol solvent while the substance is rotated. Then an oilgomer-water-TEG layer and a minimum gap containing only the TEG are formed by evaporating the ethanol solvent. Thereafter, xerogel composed of a network polymer is formed by aging. When the xerogel is dried, a xerogel layer 144 is formed on an unfilled minimum gap 143. Therefore, the mechanical strength of the xerogel layer can be improved in a bulk area due to the manufacturing workability. |
