| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the influence of restoration of asymmetry in a polarization characteristic generated, when the polarization characteristic of a ferroelectric capacitor is measured, so as to conduct highly precise evaluation. SOLUTION: A first voltage pulse is impressed on first and second capacitors in first - fourth ferroelectric capacitors, a second voltage pulse having a characteristic opposite to that of the first pulse is impressed on the third and fourth capacitors, all the capacitors are stored at a first temperature, a third pulse having polarity the same as that of the first pulse is impressed to the first and second capacitors, the fourth voltage pulse having polarity the same as that of the second pulse is impressed to the third and fourth capacitors, the fifth pulse having polarity opposite to that of the first pulse is impressed on the first and second capacitors, the sixth voltage pulse having polarity opposite to that of the second pulse is impressed on the third and fourth capacitors, all the capacitors are stored at the second temperature, a seventh pulse having polarity opposite to that of the first pulse is impressed on the first and third capacitors, time variation for polarization is measured, while impressing the eighth pulse having polarity same to that of the first pulse to all the capacitors, and the difference between polarization values is calculated.</p> |
