| 摘要 |
<p>PURPOSE:To simultaneously produce an org. pyroelectric and piezoelectric body excellent in heat resistance and insulating property by forming a large-area polyurea film on a substrate in uniform thicknesss and quality with this device. CONSTITUTION:A positive bias voltage is impressed on a substrate 3, the substrate 3 is irradiated with an electron, monomers of a polyurea are vaporized in vacuum, a polyurea film being deposited and polymerized on the substrate 3 is polarized, and an org. pyroelectric and piezoelectric body is produced.</p> |
