发明名称 |
Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition |
摘要 |
The invention relates to a microbeam oscillator. Tuning of the oscillator is carried out by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator member.
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申请公布号 |
US2004183603(A1) |
申请公布日期 |
2004.09.23 |
申请号 |
US20040804897 |
申请日期 |
2004.03.19 |
申请人 |
MA QING;CHENG PENG;RAO VALLURI |
发明人 |
MA QING;CHENG PENG;RAO VALLURI |
分类号 |
B81B3/00;H02N2/00;H03H9/02;H03H9/24;(IPC1-7):G01R23/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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