| 摘要 |
A scanning electron microscope has an electron gun for producing an electron beam, a specimen holder holding the specimen, an objective lens for sharply focusing the beam onto the specimen, and a power supply for applying a negative voltage to the specimen. A shielding plate made of a conductive material and having at least one hole for limiting the region of the specimen surface illuminated by the beam is mounted on the holder. A voltage almost equal to the voltage applied to the specimen is applied to the shielding plate.
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