PIEZOELECTRIC ACTUATOR, CLOCK, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that facilitates wiring for supplying a driving signal to piezoelectric elements.

SOLUTION: The piezoelectric actuator A has a plate-like substrate 32 and the piezoelectric elements 30 and 31 laminated on the substrate 32. The piezoelectric actuator is provided with a diaphragm 10 that is vibrated by the piezoelectric elements 30 and 31 being supplied with a driving signal, and a rotor 100 that is driven by the vibration of the diaphragm 10. The piezoelectric actuator further comprises a fixing portion 11 that fixes the diaphragm 10 and lead substrates 14A and 14B that are fixed on the fixing portion 11 and supply the piezoelectric elements 30 and 31 with a driving signal from a drive circuit 500 that drives the piezoelectric elements. The lead substrates 14A and 14B have connecting portions 17A to 17C that extend to electrodes 33A and 33C for power supply provided on the piezoelectric elements 30 and 31 and an electrode 34 for detection.

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