| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch preventing an increase of an optical loss by enhancing the strength of mirror units formed according to a semiconductor process and the optical switch made by matrically arranging them and performing an accurate mirror operation. SOLUTION: The optical switch is provided with a mirror unit 60 which has a mirror 111 for reflecting a light beam; a support part 302 for movably supporting the mirror 111 and a movable part for moving the mirror 111, and switches an optical path of the light beam by the movement of the mirror 111, wherein a side wall 101 having cut-out parts on the optical path is disposed on the surrounding of the mirror unit 60 (a frame part 301). COPYRIGHT: (C)2006,JPO&NCIPI |
