| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface uneven configuration detector using a fiber optical plate excellent in light emission characteristic and having high detecting accuracy. SOLUTION: The detector is composed of: a first plate 2 which is formed by integrally bundling a plurality of optical fibers 21 and which is provided with a light-incident surface 22 and a light-emitting surface 23 formed obliquely to the optical axis of the optical fibers 21 and made parallel to each other; a second plate 3 which is formed by integrally bundling a plurality of optical fibers 31, which is provided with a light-incident surface 32 and a light-emitting surface 33 formed obliquely to the optical axis of the optical fibers 31 and made parallel to each other, and which is made a large numerical aperture to the first plate 2, with the light-incident surface 32 joined to the light-emitting surface 23 of the first plate 2; and an imaging element 4 which detects the light image emitted from this second plate 3. COPYRIGHT: (C)2006,JPO&NCIPI
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