| 摘要 |
A structure of a backup tool for a thermo-compression tool and a tap bonding process are provided to compensate that a tool tip is non-uniformly heated by a heater by varying the structure of the backup tool for supporting a substrate, thereby providing uniform temperature and pressure to the substrate and improving the attachment efficiency of an anisotropic conductive film used for tap bonding. A tip housing(54) has a heater within it. A tool tip(58) is installed in the bottom of the tip housing, and presses a tap at predetermined temperature and pressure to be attached. A backup tool(62) is installed as being spaced from the tool tip as much as a predetermined distance to support a substrate. By the backup tool, the pressure generate when the tool tip presses the tap is uniformed over the whole tool tip. If the tool tip is bent by non-uniform heating of a heater(56), a backup tool piece(64) is rotated. Therefore, the backup tool piece uniforms temperature and pressure non-uniformly distributed by the transformation of the tool tip. |
