FABRICATION METHOD AND APPARATUS FOR OPTICAL DEVICE

摘要

The present invention relates to a manufacturing method of optical elements and manufacturing apparatus thereof capable of precisely manufacturing optical elements with a nanometer degree of precision. The main characteristic is to form optical elements by introducing organic precursors broken down into volatile and non-volatile parts by electron beams and radiating the electron beams to a substrate to make broken non-volatile parts deposited on the substrate. According to the disclosed specification, the present invention is capable of manufacturing optical elements with a nanometer degree of precision, forming optical elements on an uneven substrate, forming complex three dimensional structural optical elements, and for tuning the structure.