Resonator with a staggered electrode configuration

摘要

An integrated circuit device includes a piezoelectric substrate having a first surface and a second surface opposite the first surface. The device also includes a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width. The device further includes a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, and the fourth electrode having a fourth width that is substantially the same as the first width. The first and third electrodes operate as part of a first portion of a microelectromechanical systems (MEMS) resonator, and the second and fourth electrodes operate as part of a second portion of the MEMS resonator.

主权项

1. An integrated circuit device, comprising:
a piezoelectric substrate having a first surface and a second surface opposite the first surface; a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width different from the first width; and a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, the fourth electrode having a fourth width that is substantially the same as the first width, the first electrode and the third electrode being aligned on a same side of the first surface and the second surface of the piezoelectric substrate and arranged to operate as a first portion of a microelectromechanical systems (MEMS) resonator, in which one of the first electrode and the third electrode is an input electrode and the other electrode is either an output electrode or a ground electrode, and the second electrode and the fourth electrode being aligned on a same side of the first surface and the second surface of the piezoelectric substrate and arranged to operate as a second portion of the MEMS resonator, in which one of the second electrode and the fourth electrode is an input electrode and the other electrode is either an output electrode or a ground electrode.