发明名称 |
Electromechanical conversion element, liquid drop discharge head and image forming apparatus |
摘要 |
An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by θ-2θ measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points. |
申请公布号 |
US9385298(B2) |
申请公布日期 |
2016.07.05 |
申请号 |
US201514867350 |
申请日期 |
2015.09.28 |
申请人 |
RICOH COMPANY, LTD. |
发明人 |
Mizukami Satoshi;Kuroda Takahiko;Ishimori Masahiro |
分类号 |
B41J2/045;H01L41/08;H01L41/18;B41J2/14;H01L41/083 |
主分类号 |
B41J2/045 |
代理机构 |
Cooper & Dunham LLP |
代理人 |
Cooper & Dunham LLP |
主权项 |
1. An electromechanical conversion element comprising:
a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film, wherein a diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by a θ-2θ measurement in an X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points. |
地址 |
Tokyo JP |