| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter having a wider wavelength band in which the filter is functional.SOLUTION: An optical filter 3 includes a functional unit 7 having a plurality of filter pieces 14 separated by slits 13, where at least a surface of each filter piece is covered with a precious metal layer 15 and where filter pieces are supported in a manner that allows a slit width to be varied. Such an arrangement allows for better suppressing the pull-in phenomenon and process constraints and for appropriately increasing a variable range compared to conventional Fabry-Perot filters. As a result, the optical filter can extract light in a wider wavelength band compared with conventional optical filters.SELECTED DRAWING: Figure 2 |
