COMBINED MACHINING APPARATUS AND COMBINED MACHINING METHOD

摘要

Provided are a combined machining apparatus and a combined machining method capable of performing machining with higher accuracy and at a high speed. The apparatus has a stage unit; a mechanical machining unit including a mechanical machining head having a tool configured to machine a workpiece; a laser machining unit including a laser machining head configured to emit laser for machining the workpiece; a moving unit; and a control unit that controls the operation of each unit, in which the laser machining head has a laser turning unit that turns laser relative to the workpiece, and a condensing optical system that focuses the laser turned by the laser turning unit, and a position at which the workpiece is irradiated with the laser is rotated by the laser turning unit.

主权项

1. A combined machining apparatus comprising:
a stage unit that includes a stage configured to support a workpiece; a mechanical machining unit that includes a mechanical machining head having a tool configured to machine the workpiece; a laser machining unit that includes a laser machining head configured to emit laser for machining the workpiece; a moving unit that includes a Y-axis moving mechanism, a first X-axis moving mechanism, a second X-axis moving mechanism, a first Z-axis moving mechanism and a second Z-axis moving mechanism, the Y-axis moving mechanism relatively moving the laser machining head, the mechanical machining head and the stage in a Y-axis direction, the first X-axis moving mechanism being fixed to the Y-axis moving mechanism to relatively move the mechanical machining head in an X-axis direction orthogonal to the Y-axis direction, the second X-axis moving mechanism being fixed to the Y-axis moving mechanism to relatively move the laser machining head in the X-axis direction, the first Z-axis moving mechanism being fixed to the first X-axis moving mechanism to relatively move the mechanical machining head in a Z-axis direction orthogonal to the Y-axis direction and the X-axis direction, and the second Z-axis moving mechanism being fixed to the second X-axis moving mechanism to relatively move the laser machining head in the Z-axis direction; and a control unit that controls the operation of each unit, wherein the laser machining head has a laser turning unit that turns the laser relative to the workpiece, and a condensing optical system that condenses the laser turned by the laser turning unit, and a position at which the workpiece is irradiated with the laser is rotated by the laser turning unit.