INSPECTION UNIT, INSPECTION METHOD, AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

摘要

Disclosed are an inspection unit, an inspection method, and a substrate treating apparatus including the same. A substrate treating apparatus includes a treatment unit including a container, and a support member situated in the interior of the container to support a substrate, the treatment unit being configured to treat the substrate a nozzle unit having a treatment liquid nozzle for supplying a treatment liquid to the substrate provided in the treatment unit and an inspection unit that inspects whether the treatment liquid is normally discharged from the treatment liquid nozzle. The nozzle further includes a nozzle driver that moves the treatment liquid nozzle from a process position at which the substrate is treated by the treatment unit and an inspection position at which the treatment liquid nozzle is inspected by the inspection unit. The inspection unit includes a plate of a transparent material, a photographing member situated below the plate, a light source member that irradiates light onto a path of the treatment liquid discharged from the treatment liquid nozzle towards the plate at the inspection position, and a determination member that determines whether the treatment liquid is normally discharged, from an image photographed by the photographing member.

主权项

1. A substrate treating apparatus, comprising:
a treatment unit comprising a container, and a support member situated in the interior of the container to support a substrate, the treatment unit being configured to treat the substrate; a nozzle unit having a treatment liquid nozzle for supplying a treatment liquid to the substrate provided in the treatment unit; and an inspection unit that inspects whether the treatment liquid is normally discharged from the treatment liquid nozzle, wherein the nozzle unit further comprises a nozzle driver that moves the treatment liquid nozzle from a process position at which the substrate is treated by the treatment unit and an inspection position at which the treatment liquid nozzle is inspected by the inspection unit, and wherein the inspection unit comprises: a plate of a transparent material; a photographing member situated below the plate; a light source member that irradiates light onto a path of the treatment liquid discharged from the treatment liquid nozzle towards the plate at the inspection position; and a determination member that determines whether the treatment liquid is normally discharged, from an image photographed by the photographing member.