MEASUREMENT DEVICE AND MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique for inspecting an amount of supported catalyst in a metal catalyst in a fuel cell, while suppressing an economic loss.SOLUTION: A measurement device 1 measures an amount of the supported catalyst in a metal catalyst with respect to a specimen 9 in which a thin film of a metal catalyst layer including the metal catalyst is formed. The measurement device 1 comprises: a terahertz wave irradiation part 10 for irradiating the specimen 9 with a terahertz wave T1 in the range of 0.01 THz to 10 THz; a transmitted terahertz wave detection part 30 for detecting the field density of a transmitted terahertz wave LT2 having transmitted the specimen 9; a storage part 60 for storing correlation information C1 showing a correlation between the preobtained amount of the supported catalyst in the metal catalyst and the field density of the transmitted terahertz wave LT2; and a supported catalyst amount acquisition module 511 for acquiring the amount of the supported catalyst in the metal catalyst in the specimen 9 based on the field density of the transmitted terahertz wave LT2 detected by the correlation information C1 and a transmitted terahertz wave detection part 30.SELECTED DRAWING: Figure 1