| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor which is close to a pressure sensitive function of a human's hand and finger, and to properly sense the change of feeble pressure corresponding to the objects of various shape, by utilizing a piezoelectric element obtained by forming a piezo-electric layer onto a flexible base having a titanium component in the uppermost surface, by the hydrothermal synthesis, and stacking an electrode layer onto the same, as a sensor means. SOLUTION: The lead wires 4, 5 are mounted on a support 2 made of an elastic material such as silicone rubber, natural rubber, fluorine rubber or the like, a PET film is laminated on a surface of a point projecting part of the support 2 to form a PET layer 6, and the PET layer 6 is coated with the titanium foil 7. Then a piezo-electric layer 8 is formed on the support 2 coated with the titanium foil 7, by the hydrothermal synthesis, and an electrode layer 9 is stacked or coated on the same to form piezoelectric element to be utilized as a sensor means. Whereby a member of complex shape, or a member of round shape can be detected with high accuracy. |
