发明名称 真空ポンプの通気方法および真空ポンプを備えた装置
摘要 The method involves comprises a high speed rotating rotor (12), where the time interval is determined by evaluation of time measurement for speed reduction by introducing a gas. The time interval is determined from one value to other value. The flow rate of a venting valve (261,262) is determined, where the venting valve has a valve assembly (26). An independent claim is also included for an arrangement with a vacuum pump.
申请公布号 JP5985182(B2) 申请公布日期 2016.09.06
申请号 JP20110277299 申请日期 2011.12.19
申请人 プファイファー・ヴァキューム・ゲーエムベーハー 发明人 ヨッヘン・ベトッハー;ベルンハルト・コッホ
分类号 F04D19/04;F04D27/00 主分类号 F04D19/04
代理机构 代理人
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