MANUFACTURE OF FINE SEMICONDUCTOR PARTICLES

摘要

PROBLEM TO BE SOLVED: To stably manufacture fine semiconductor particles by forming the particles through the heterojunction of semiconductor micro-clusters with sensitized pigment molecules by passing a beam through a sensitized pigment vapor. SOLUTION: Plasma is produced from a solid material 5 which is a raw material by irradiating the material 5 with light 2 in a vacuum atmosphere. At the time of irradiating the material 5 with the light 2, the light 2 is converged onto the surface of the material through a lens 4, etc., so that the plasma can be produced efficiently. Formed semiconductor clusters are jetted into an ultra-high vacuum tank with a high-speed inert gas flow to form a semiconductor cluster beam 8. The beam 8 is introduced to a sensitized pigment vapor chamber 9 provided in the ultra-high vacuum tank and, in the chamber 9, the semiconductor clusters form fine semiconductor particles through the heterojunction with a sensitized pigment 10 while passing through the chamber 9.