| 摘要 |
PURPOSE: To provide a laser beam machine and a laser beam machining method capable of efficiently discharge machining chips from fine holes and grooves, and excellently machining the smaller and deeper holes and fine grooves. CONSTITUTION: In a laser beam machine, a work in a vacuum tank 1 is irradiated with the pulse-shaped laser beam to be machined. A base electrode 2 and an opposite electrode 3 are arranged in the vicinity of the work to generate the electric field, and an electric field generating power source 11 is connected to each electrode. The quantity of the electric charge of the particles emitted from the work during the irradiation of the laser beam is detected by the current value to be detected by current detectors 12, 13 provided on the power- supply line of the base electrode 2 or the opposite electrode 3. The electric field generating power source 11 alternately generates the electric field in the vicinity of the work according to the quantity of the positive or negative electric charge of the detected emitted particles. |
