,申请号JP19820015875-传众专利搜索

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发明名称
摘要
申请公布号	JPS6059104(B2)	申请公布日期	1985.12.23
申请号	JP19820015875	申请日期	1982.02.03
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	TOJO TOORU;MORI ICHIRO;SANO SHUNICHI
分类号	B23Q3/15;H01L21/683	主分类号	B23Q3/15
代理机构		代理人
主权项
地址

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