Sensoreinheit mit mindestens einem Beschleunigungssensor, z. B. zur Kfz-Airbagauslösung, und Verfahren zu seiner Herstellung

摘要

A micromechanical sensor unit for detecting acceleration has at least one pendulum with a spiral spring (B) and a seismic mass (P), a support (E) for each pendulum and at least two position feelers (S). Each position sensor (S) and its pendulum form a switch with a defined triggering threshold and at least two switches respond to the same direction of acceleration. To each switch is allocated a measuring resistor (R), these measuring resistors (R) forming a resistor network with a node to receive a quasi-analog acceleration signal (a).