发明名称 EXCIMER LASER OF NARROW-BAND OSCILLATION
摘要 PURPOSE:To make it possible to oscillate effectively a laser beam suitable for reduction projection, by setting the specification of an etalon. CONSTITUTION:The specification of an etalon is set so as to satisfy eq. 1 where T(x) is the power spectrum of a beam, and OTF(x) is the space frequency transfer function at a wave number x wherein the wavelength is shifted fixing the reference image plane at a wave number 0. In this manner a desired resolution can be obtained. For example, even if the spectrum line width of an oscillation is made narrow, a high power laser having plenty of transversal mode is obtained, which is used most preferably as the light source for a reduction projection equipment.
申请公布号 JPS62263683(A) 申请公布日期 1987.11.16
申请号 JP19860106278 申请日期 1986.05.09
申请人 KOMATSU LTD 发明人 KAJIYAMA KOICHI;SAITO KAORU;ITAKURA YASUO;WAKABAYASHI OSAMU;KOWAKA MASAHIKO
分类号 H01S3/08;H01S3/081;H01S3/108;H01S3/223;H01S3/225 主分类号 H01S3/08
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