发明名称 |
Gas flow type angular velocity sensor. |
摘要 |
<p>A gas flow type angular velocity sensor comprising two semiconductor substrates with all components formed thereon by use of a semiconductor technology and an IC technology, which are coupled with each other to form therein a pair of heat wires, a gas path and a nozzle holes for injecting a gas flow toward the paired heat wires in the gas path. Two heat wires of the pair changes their resistance-temperature characteristics in accordance with a deflection of the gas flow due to the action of angular velocity and a difference between two changed values is picked up and amplified by a resistance bridge circuit and an amplifier circuit formed on the semiconductor substrates to produce an output signal proportional to the angular velocity to be measured. A miniature pump formed on semiconductor substrates and drivable by a piezoelectric element provides a stabilized gas flow in the sensor. Thus constructed sensor is compact, accurate and suitable for mass-production and free from disadvantages of conventional sensors.</p> |
申请公布号 |
EP0405452(A2) |
申请公布日期 |
1991.01.02 |
申请号 |
EP19900112140 |
申请日期 |
1990.06.26 |
申请人 |
HONDA GIKEN KOGYO KABUSHIKI KAISHA |
发明人 |
TAKAHASHI, TSUNEO;IKEGAMI, MASAYUKI;NISHIO, TOMOYUKI;GUNJI, TAKAHIRO |
分类号 |
G01C19/00 |
主分类号 |
G01C19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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