| 摘要 |
<p>PURPOSE:To prevent the deterioration, etc., in light transmission and pressure resistance and disconnection due to the specific oxide formed within a pin hole, while averting the corrosion of Al and Al2O3 by anodizing all of the constituting elements to be patterns with the same material and the same stages as for gate lines consisting of Al without a stage for adhering a resist. CONSTITUTION:The constituting part made from Al and provided on a transparent insulating substrate 51 is patterns and is anodized over the entire surface immediately thereafter. Namely, a gate 52, made of Al the gate line 53 integral therewith, an auxiliary capacitance electrode and an auxiliary capacitance line integral therewith and a connecting line for integrating the gate line 53 and the auxiliary capacitance line are formed on the transparent insulating substrate 51. The part made up of Al on the substrate is anodized over the entire surface without subjecting this part to patterning of the resist and the stage for removing this resist and in succession, the entire surface is provided with a gate insulating film 56. Then, the gate line 53 and the auxiliary capacitance line are not particularly immersed into a peeling liquid and developer and, therefore, the formation of the pinhole and the deterioration in pressure resistance are prevented.</p> |
