发明名称 DRIVE OF OSCILLATORY ACTUATOR
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of cogging phenomena and drive an oscillatory actuator stably by providing a drive with a voltage control circuit which controls the AC voltage of a voltage generating circuit so as to fix the amplitude value or the execution value of the current supplied from the voltage generating circuit to an electrochemical converting element. SOLUTION: When AC voltage Va is applied to an oscillator 100-4 and a current Ia is generated, a potential difference proportionate to the magnitude of the current Ia is brought into existence between both terminals of a resistor 7. A differential amplifier 8 detects this potential difference, and outputs the voltage Vi corresponding to it to an amplitude detector 9. The voltage Vi is AC voltage which changes in proportion to the current Ia, and the magnitude of the current Ia is expressed by the amplitude value of this AC voltage, or an effective value or the like. The amplitude detector 9 detects the amplitude value of the inputted AC voltage Vi, and outputs the voltage signal Vp corresponding to it to a magnification factor controller 6. Then, the value of the current Ia supplied from the amplifier 5A to the oscillator 100-4 is controlled to fixed one corresponding to the fixed voltage Vref.
申请公布号 JPH09182467(A) 申请公布日期 1997.07.11
申请号 JP19950341094 申请日期 1995.12.27
申请人 NIKON CORP 发明人 MOGI KIYOSHI
分类号 H02N2/00 主分类号 H02N2/00
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