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发明名称
Rotating cathodic sputtering cathode with plural targets
摘要
申请公布号
EP0703599(B1)
申请公布日期
1997.12.03
申请号
EP19950402127
申请日期
1995.09.21
申请人
SAINT-GOBAIN VITRAGE
发明人
DRESSE, LOUIS
分类号
H01J37/34;(IPC1-7):H01J37/34
主分类号
H01J37/34
代理机构
代理人
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