发明名称 |
Electrical means for extracting layer to layer registration |
摘要 |
A method for determining a fiducial misregistration of conductive layers of a laminated substrate by providing a plurality of alternatingly disposed dielectric layers and conductive layers. A predetermined area of resistive material is formed as part of at least one conductive layer. Each predetermined area of resistive material is formed at a same corresponding location in each respective conductive layer, and each predetermined area of resistive material has a first end and a second end. A through-via is formed and connected to each predetermined area of resistive material between the first and second ends of each respective predetermined area. A total resistance is determined between the first end and the second end of each predetermined area of resistive material. A first fractional resistance is determined between the first end of each predetermined area of resistive material and the through-via. A second fractional resistance is determined between the second end of each predetermined area of resistive material and the through-via. A fiducial misregistration of each conductive layer with respect to a location of the through-via is determined based on the respective first and second fractional resistances and the respective total resistance for each predetermined area of resistive material. |
申请公布号 |
AU5148698(A) |
申请公布日期 |
1998.05.29 |
申请号 |
AU19980051486 |
申请日期 |
1997.10.22 |
申请人 |
W.L. GORE + ASSOCIATES INC. |
发明人 |
DAVID A. HANSON |
分类号 |
H01L21/66;H05K1/02;H05K1/16;H05K3/46 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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