发明名称 Fabrication of bipolar/CMOS integrated circuits and of a capacitor
摘要 The present invention relates to a method for fabricating an integrated circuit including MOS transistors and a bipolar transistor of NPN type, including the steps of: forming the MOS transistors, covering the entire structure with a protection layer, opening the protection layer at the base-emitter location of the bipolar transistor, forming a first P-type doped layer of polysilicon, a second layer of silicon nitride and a second oxide layer, opening these last three layers at the center of the emitter-base region of the bipolar transistor, and depositing a third silicon nitride layer, forming spacers, removing the apparent parts of the third layer of silicon nitride, and depositing a third N-type doped polysilicon layer.
申请公布号 US6156594(A) 申请公布日期 2000.12.05
申请号 US19970970070 申请日期 1997.11.13
申请人 SGS-THOMSON MICROELECTRONICS S.A. 发明人 GRIS, YVON
分类号 H01L21/8249;H01L27/06;(IPC1-7):H01L21/823 主分类号 H01L21/8249
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