Piezoelektrischer/elektrostriktiver Antrieb mit mindestens einer piezoelektrischen/elektrostriktiven Schicht.

摘要

A piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive unit (4, 6, 8, 22, 28) each including a first electrode film (4, 22), a piezoelectric/electrostrictive film (6, 28) and a second electrode film (8, 22) which are superposed on each other on a ceramic substrate (2), or at least one piezoelectric/electrostrictive unit (16, 17) each including a plurality of patterned spaced-apart electrode film strips (16) formed on a ceramic substrate (2), and a plurality of patterned spaced-apart piezoelectric/electrostrictive film strips (17) each formed on the ceramic substrate and disposed between and in contact with adjacent ones of the electrode film strips. At least a selected portion of the ceramic substrate on which the unit or units is/are disposed has grain boundaries (26) which contain lead.