| 摘要 |
A high temperature anti-droop end effector for a substrate transfer is provided to prevent the droop and deformation of a substrate due to a weight of the end effector by forming a slope on a mounting end of the end effector. An end effector assembly(100) includes an end effector(110) and a clamp(130). The clamp fixes the end effector in a cavity(141) of a mounting plate(140) of a robot arm. The mounting plate, the end effector, and the clamp are stacked through holes(143,113,131) by using a screw(133). The end effector includes a free end(124) and a fixing end(111). The fixing end fixes the end effector on the mounting plate. The fixing unit and the clamp are arranged in the cavity. The free end includes two fingers(115) formed by external opposite edges(128) and internal facing edges(127). The end effector includes a substrate detecting cut-out(118) to detect a substrate. The end effector includes a center-finder hole(114) to measure a center of the end effector by means of a pin. A slope is formed on a bottom surface of the fixing end. |
