| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an operation information management system for quickly responding to a trouble at an operation site when trouble occurs in a CMP device. <P>SOLUTION: This operation information management system is configured by connecting a host system 500 and a plurality of client systems 700 through a communication network 600, and the host system 500 is connected to an engineer department 570 so that information can be exchanged. Each client system 700 is configured with a CPM device 1, and the CPM device 1 is provided with a control device 400 which controls the operation, and monitors a trouble. The host system 500 is provided with: a CMP specific operation related file 510; a troubleshooting database 520; a trouble analysis application 530; and a display creation device (not shown). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
