| 摘要 |
A diamond-like carbon film with a nano-undulated surface is provided to reduce the humidity dependence of friction coefficient due to the characteristics of the nano-undulated surface suppressing tribo-chemical reaction in the transition layer. A diamond-like carbon film has a nano-undulated surface which is formed on a nano dot pattern of a substrate, with RMS surface roughness of 5nm to 50nm. The nano dot pattern is made of metal selected in the group consisting of nickel, cobalt, chrome, iron, zinc, copper, gold, silver, molybdenum, palladium and platinum, and its diameter is 20nm to 800nm. The diamond-like carbon film with the nano-undulated surface is formed by RF-PACVD(Radio Frequency-Plasma Assisted Chemical Vapor Deposition) using methane gas as reaction gas.
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