| 摘要 |
PROBLEM TO BE SOLVED: To provide a hermetic connection structure in which a material can be transferred between a first transfer space in a non-cleaned environment and a second transfer space where various treatments are performed on a cleaned material via a material transfer opening, without being contaminated by the first transfer space.SOLUTION: A plurality of flange rings 2, 3, 5 to 8 are sequentially and hermetically mounted on a material transfer opening, from a peripheral edge on a side close to first and second transfer spaces toward the center. A connection member 10 is integrally fixed to the center opening of the innermost flange ring 8. The flange ring 8 can slide and rotate on an adjacent flange ring 6 having an inner side with which the flange ring 8 hermetically engages; and the flange ring 8 also rotates by interlocking with the connection member 10. The flange ring 8 has, on a second transfer space side, a door body 11 for opening and closing the center opening of the connection member 10, and a locking/releasing mechanism of the door body 11, and has, on a first transfer space side, an opening/closing operation member and a locking/releasing operation member of the door body 11 and a rotation handle 9 of the connection member 10.SELECTED DRAWING: Figure 5 |
